Thermo Fisher Scientific has completed multiple installations of its Thermo Scientific Optis focused ion beam-scanning electron microscope (FIB-SEM).
The FIB-SEM is an automated instrument for preparing samples imaged with a transmission electron microscope (TEM). The device prepares samples directly from a wafer. Thermo Fisher said this helps chipmakers get data sooner and with more confidence than other systems.
Why FIB-SEM is needed to navigate complex development decisions
As chips grow more complex, chipmakers need faster, more accurate and more consistent data, Thermo Fisher said. The FIB-SEM combines automated sample preparation, robotics and AI-enabled tools for lab workflows. This helps to get data on development decisions sooner, the company added.
As design becomes more complex, precise measurements from wafers earlier in R&D are needed, Thermo Fisher added. The Optis FIB-SEM automates the handling of wafers and sample grids, the preparations step and the flow of information between them. This allows facilities to prepare TEM samples with fewer manual steps, clearer records of each sample and more predictable operation, the company said.
“Semiconductor manufacturers are producing extraordinarily complex devices to meet the demands of modern technology, which means they need faster process learning, higher throughput and more consistent, high-quality data,” said Mohan Iyer, vice president and general manager of semiconductors at Thermo Fisher Scientific.
Iyer said the Optis FIB-SEM is built for the next era of device scaling and extends automation within the Vulcan Automated Lab across the production workflow.
