Spellman High Voltage Electronics Corp., a high voltage power supply, X-ray generator and Monoblock X-ray source manufacturer, has launched of the MSC2.5PN7.5, a bipolar reversible power supply specifically designed for electrostatic chuck (ESC) clamping applications.
Source: Spellman High Voltage Electronics Corp.ESCs use a platen with integral electrodes, which are biased with high voltage to establish an electrostatic holding force between the platen and wafer, thereby “chucking” the wafer. This unit is designed to provide the high voltage to drive the electrodes.
Two 0 V to 2500 V at 7.5 W reversible outputs that are of opposite polarity are provided on the two high voltage output connectors. Front panel controls via programming buttons and an LCD display allow local operation and control of the unit. The RS-232/RS-485/Ethernet digital interface allows for simple OEM integration into complex system designs.
Input is +24 V DC and current is 0 mA to 3 mA. It is arc and short circuit protected as well as RoHS and CE compliant.
