MEMS and Sensors

ST develops tiny MEMS mirror for Intel’s lidar system

09 March 2021
The micro-mirror contributes to the lidar camera’s hockey-puck size and enables continuous laser scanning across the entire field of view. Source: STMicroelectronics

ST Microelectronics has developed a tiny microelectromechanical (MEMS) mirror with Intel enabling spatial scanning of an environment.

Built into the Intel RealSense lidar camera L515, the micro-mirror contributes to the lidar camera’s hockey-puck size and enables continuous laser scanning across the entire field of view. With a custom photodiode sensor, the RealSense lidar camera L515 renders a 3D depth map of the entire scene.

The lidar can be used to provide high resolution scanning for industrial applications such as robotic arms for bin picking, volumetric measurements, logistics and 3D scanning.

The L515 uses scanning capabilities of ST’s MEMS to deliver high-resolution depth with no interpolated pixels, the ability to control the field of view and provide close to zero-pixel blur driven by the low 50 ns exposure time, ST said.

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