MEMS and Sensors

Solid-state lidar using MEMS mirror ICs

22 July 2022
The CG0006AR MEMS IC integrates an angular and temperature sensor and a field of view of 60x30 degrees. Source: Yitoa Micro

Yitoa Micro Technology Corp. has developed a microelectromechanical system (MEMS) mirror semiconductor for use in automotive lidars.

The solid-state lidar using a MEMS mirror is one of the best ways to realize lidar in vehicles, Yitoa Micro said. The lidar with integrated MEMS mirror is compact and low cost, something that was not possible with mechanical methods of rotating lidar.

Called the CG0006AR, the MEMS mirror IC includes features such as:

  • Electromagnetic MEMS mirror for automotive lidar
  • Mirror diameter 4 mmφ
  • Dual axis (X and Y)
  • Wide field of view of 60 x 30 degrees
  • Integrated angular sensor and temperature sensor

Yitoa said it is also developing MEMS with smaller dimensions and smaller mirror diameter for augmented reality smart glasses, heads-up displays (HUDs), pico projectors and more.

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