Korean memory chipmaker SK Hynix has adopted the Metron 3D 300 mm in-line wafer metrology system from Infinitesima.
SK Hynix will use the technology in volume production as it provides 3D process control with sub-nanometers accuracy for the manufacturing of memory semiconductors.
The Metron 3D system features the Rapid Probe Microscope (RPMTM) technology that provides AFM measurement capability at 10x to 100x typical AFM throughput. The system’s capabilities include fully automated wafer, data and probe handling.
“Three-dimensional process control at the nano-scale level is becoming increasingly important to ensure high yield in advanced DRAM processes,” said Young-Hyun Choi, head of DMI at Infinitesima. “Infinitesima’s Metron®3D has demonstrated excellent sub-nanometre 3D metrology with the required cost-of-ownership necessary for HVM implementation.”
