A new resource for metrology and software engineers is available from k-Space, a supplier of advanced metrology systems for thin-film and industrial metrology applications.
The k-Space Knowledge Base includes troubleshooting tips, answers to FAQs, helpful procedures, best practices, thin-film resources and much more. It provides access to product manuals and video tutorials for all k-Space metrology offerings.
The thin-film metrology applications covered focus on optical methods for precision measurement of thin-film and wafer temperature, stress, curvature, bow, deposition rate, reflectivity, spectral reflectance and
The kSA BandiT. Source: k-Space Associates, Inc. transmission, and reflection high-energy electron diffraction (RHEED). These solutions cover many industries, including glass, solar, automotive and building materials, utilizing optical methods to measure color, precise part dimensions, surface defect inspection and more.
Users can find guidance on applications for the kSA Atomic Control for Epitaxy system based on the principle of atomic absorption spectroscopy to provide atomic flux control with high-resolution source flux and growth rate monitoring during thin-film deposition. Information is provided for many other metrology options, including the kSA BandiT, which uses a patented blackbody emission monitor to measure the full range of temperatures for most semiconductor substrate materials, including low band-gap substrates and metal films.
