The MEMS inertial sensor. Source: First Sensor First Sensor has introduced a line of microelectromechanical systems (MEMS) inertial sensors targeted at recording vibrations or changes of inclination in wind turbines, bridges and high-rise buildings.
The sensors operate to ensure the safety of structures both in everyday operations and following events such as storms, earthquakes, large loads or changes in the foundations. The sensors are based on a silicon sensor element on First Sensor’s microelectromechanical process in conjunction with a signal-processing application-specific integrated circuit (ASIC) in a hermetically sealed surface mount device (SMD) housing.
Smart sensors can be used to continuously monitor and analyze the condition and loading of buildings, bridges and wind turbines to uncover where repairs or improved safety measures can be identified more effectively and reduce potential risks during dramatic weather events.
The sensors detect even small changes in position or acceleration of structures, according to First Sensor, and they feature high signal-to-noise ratios, temperature stability and air-gap-insulated microstructures to minimize parasitic capacitances.
When used as acceleration sensors, the MEMS offer measurement ranges of ±3 g, ±8 g and ±15 g and achieve a noise density of less than 30 µg/√Hz and resolutions of less than 40 to 95 µg at a measurement frequency of 10 Hz. As inclination sensors with measurement ranges of ±30°, the sensors achieve a noise density of less than 0.0004°/√Hz and resolutions of less than 0.0015° at a measurement frequency of 10 Hz.
