MEMS and Sensors

X-Fab providing silicon-based microfluidics for MEMs systems

20 May 2020
One of X-Fab's silicon-on microfluids MEMS systems, the Lab-on-a-chip. Source: X-Fab

German manufacturer X-Fab Silicon Foundries SE has added microfluidic elements to its complementary metal–oxide–semiconductor (CMOS) and silicon on insulator (SOI) wafer manufacturing for micro-electro-mechanical systems (MEMS)-based technology.

X-Fab said the new process capabilities will help to remove barriers to market entry and shorten development cycles for MEMS-based electronic device design.

The extension to its process capabilities include:

  • Noble metal electrode arrays
  • Inorganic layers for surface passivation and protection
  • Deep silicon trenches and cavities
  • Bonded silicon or glass lid wafers
  • Polymeric fluidic structures

X-Fab has made about $25 million worth of investments in silicon-based microfluidics in the past five years including applications such as lab-on-a-chip, DNA sequencing and synthesis, cancer diagnostics and more. The company is expanding its portfolio of standard process blocks covering these capabilities. This will allow the re-use of existing process IP and accelerate product development cycles as well as scale up to volume production.

X-Fab said the silicon-based microfluidics MEMS technology could open new opportunities such as MEMS solutions for drug administering, flow metering and pollution monitoring.

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