Semiconductor Equipment

SMIC to Spend $570 Million on ASML Tools

27 October 2014

Semiconductor Manufacturing International Corp. (SMIC) has signed an agreement with ASML Holding N.V. to provide lithography systems to the pure-play foundry for about $570 million.

SMIC said the deal is part of a strategic partnership with ASML that is designed to help expand SMIC’s advanced technology capacities. Under the agreement, ASML will provide SMIC with tools such as its TWINSCAN NXT system for volume production of 300mm wafers at 32nm and below.

Lithography is a crucial step in the manufacturing of semiconductors, helping to create complex structures that make up the transistors on a wafer. The ASML tools will help to increase productivity, boost overlay and image performance for each wafer, SMIC said.

Tzu-Yin Chiu, CEO and executive director of SMIC, said in a statement that the partnership will “complement both sides” and using ASML tools will “facilitate and strengthen the development or our advanced technologies.”

Related links:

IHS Semiconductor Manufacturing

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