High-purity pyrolytic graphite provides innovative solutions for semiconductor applications

Pyroid^® SN-PG provides benefits for numerous applications within the semiconductor industry.

• High purity >99.999% carbon leads to low erosion rates and longer life.
• The density of Pyroid SN-PG is 2.23 g/cm³, which is greater than any known graphite due to its single crystal structure. This means that there is no porosity due to ash contamination in the material that degrades the structure.
• High in-plane thermal conductivity ensures even temperature distribution
• Stable at high temperature and vacuums
• Extreme resistance to thermal shock
• Temperature tolerance from cryogenic to >2000 C

Minerals Technologies' Pyrogenics' Group has experience manufacturing components for semiconductor applications, including

• Ion implantation grids
• Wafer trays
• Electrodes for plasma etching
• Boats
• Crucibles
• Susceptors
• Brazing and glass-to-metal sealing jigs