Non-contact 3D surface metrology and inspection for production environments

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Zygo's 3D Optical Profiler instruments enable precise, quantitative, ISO-compliant, non-contact surface measurement and characterization of micro- and nano-scale surface features, capturing up to two million data points in just seconds. Choosing the right optical profiler system depends on your application's requirements, including speed, precision, vertical range, automation and flexibility.

Our 3D Optical Profiler instruments achieve best in class performance through advanced, patented and differentiated technologies with superior speed, precision, resolution and application versatility all in a single metrology instrument.

With multiple configurations that range from simple-to-use benchtop systems to advanced fully automated platforms, Zygo's optical profilers have proven themselves in installations that range from research and development and standards laboratories to industrial process control workstations to in-line OEM metrology solutions.

Regardless of the installation type, our systems provide leading performance for optical measurements of surface structure and texture across varying surface scales and offer hundreds of reportable parameters, including areal surface roughness to ISO 25178 standards as well as 2D profile standards, ISO 4287/4288.

Our instruments include several advantages based on the core technology employed, system-level features and options, software functionality and many others. Highlighted below are just some of the key attributes and advantages over alternative technologies (confocal, focus variation)...

• Higher speed
• Superior Z-resolution (independent of magnification)
• Wider magnification/FOV range
• Capable of measuring super-smooth to rough surfaces

Zygo's ZeGage products have been taking interferometric surface profiling out of the lab and into production for nearly a decade. Powerful and trusted capabilities such as SureScan technology for vibration robust metrology are now paired with Zygo's exclusive Part Finder and Smart Setup tools to make sample changes fast and easy, minimizing wasted time and maximizing throughput.