Backed by investments from the European Chips Act, research hub Imec is collaborating with Dutch semiconductor manufacturing tool giant ASML to become one of the first hubs to feature ASML’s full suite of semiconductor manufacturing tools.
The deal will include chip innovation research as well as sustainability exploration. Specifically, in such sectors as:
- Sub-2 nm technology
- Silicon photonics
- Memory
- Advanced packaging
Five-year deal
The agreement has a duration of five years and will combine ASML’s technology with Imec’s engineering knowledge focusing on high-end nodes using ASML systems like 0.55 high-numerical-aperture (NA), extreme ultraviolet (EUV), deep ultraviolet (DUV) immersion, YieldStar optical metrology and HMI single- and multi-beam technologies.
The tools will be installed in Imec’s pilot line and incorporated in the EU- and Flemish-funded NanoIC pilot line. This line has infrastructure for sub 2 nm R&D to the international semiconductor ecosystem. The pilot line is operated and jointly funded by the Chips Joint Undertaking through the EU’s Digital Europe and Horizon Europe programs. Participating countries include Belgium, France, Germany, Finland, Ireland and Romania.
